Micro-Electro-Mechanical System, sometimes known as MEMS, is a chip-based technology. A suspended mass is sandwiched between two capacitive plates to form sensors. The hanging mass produces an electric potential difference when the sensor is tilted. It is measured as a change in capacitance. Micro-Electro-Mechanical Systems (MEMS) technology uses semiconductor manufacturing techniques to produce minuscule mechanical and electro-mechanical elements with sizes ranging from a few micrometres to several millimetres. MEMS devices are used nowadays in a variety of products, including microphones, projection display chips, blood and tyre pressure sensors, optical switches, lab-on-a-chip analytical components, biosensors, and many more.  View this PPT for more information.

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