MEMS is the acronym of what? MEMS consist of mechanical microstructures, micro sensors, micro actuators, and microelectronics, all integrated onto the same silicon chip. It is also known by other affiliated names such as microsystems technology (MST) or micro machines. MEMS is an umbrella term for a wide range of microfabrication designs, methods, and mechanisms that involve realizing moving mechanical parts at microscopic scale Microelectromechanical systems, also written as Micro-Electro-Mechanical Systems and the related micro-mechatronics and microsystems constitute the technology of microscopic devices, particularly those with moving parts. They merge at the nanoscale into nanoelectromechanical systems and nanotechnology. Application of MEMS devices includes accelerometers for airbag sensors, inkjet printer heads, computer disk drive heads, projection display chips, blood pressure sensors, optical switches, micro valves, biosensors, and many other products that are all manufactured in high commercial volumes. There are two types of MEMS accelerometers: variable capacitive and piezo resistive. Variable capacities are highly sensitive and piezo resistive are low range devices used for acceleration measurement.

Athul CK

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